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Work around issue 22898 of CMake
Use separate directories for modules of each target to circumvent [Issue 22898](https://gitlab.kitware.com/cmake/cmake/-/issues/22898) of CMake.
Use separate directories for modules of each target to circumvent [Issue 22898](https://gitlab.kitware.com/cmake/cmake/-/issues/22898) of CMake.
mentioned in commit d511f025